Oxide sintered body, method for producing same and sputtering target

氧化物烧结体、该烧结体的制造方法及溅射靶

Abstract

An oxide sintered body which contains a bixbyite phase configured of In2O3 and an A3B5O12 phase (wherein A represents one or more elements selected from the group consisting of Sc, Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu; and B represents one or more elements selected from the group consisting of Al and Ga).
一种氧化物烧结体,其包含由In2O3构成的方铁锰矿相和A3B5O12相,式中,A为选自Sc、Y、La、Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、Yb和Lu中的一种以上的元素,B为选自Al和Ga中的一种以上的元素。

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